Scanning Electron Microscope (SEM)

Hitachi S-4500 II Cold Field Emission Scanning Electron Microscope

This FE SEM is used to image features at magnification ranging from 20x to 500,000x.

Resolution depends on operating conditions:

• 1.5 nm (at 15 kV accelerating voltage, WD 4 mm)
• 4.0 nm (at 1kv accelerating voltage, WD 3mm).

Accelerating voltage can vary continuously from 0.5 kV for resist imaging to 30 kV for EDS detection and metallic surface imaging.

Stage motion ranges:

• X: 0 to 100 mm
• Y: 0 to 50 mm
• Z: 3 to 28 mm (continuous)
• Tilt: -5º to +45º
• Rotation: 360º (continuous)

The image capture software was updated in 2003 with Quartz PCI version 5.1.

Image: Al nano spirals fabricated by Tiago Ramos Leite da Silva , ChE LSU

PDF documents:

• SEM Procedures.pdf (SEM Standard Operation Procedures)
• The Compact Detector Unit.pdf (EDAX detector information)

For more information, questions or training please contact Sergi Lendinez